Impact of LER and Via-misalignment on the electric field between nanometer-scale wires

dc.contributor.author	Stucchi, Michele
dc.contributor.author	Tokei, Zsolt
dc.date.accessioned	2021-10-17T11:03:55Z
dc.date.available	2021-10-17T11:03:55Z
dc.date.issued	2008
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/14522
dc.source	IIOimport
dc.title	Impact of LER and Via-misalignment on the electric field between nanometer-scale wires
dc.type	Proceedings paper
dc.contributor.imecauthor	Stucchi, Michele
dc.contributor.imecauthor	Tokei, Zsolt
dc.date.embargo	9999-12-31
dc.source.peerreview	no
dc.source.beginpage	174
dc.source.endpage	176
dc.source.conference	11th International Interconnect Technology Conference - IITC
dc.source.conferencedate	1/06/2008
dc.source.conferencelocation	San Francisco, CA US
imec.availability	Published - open access