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Process development on large-topography microstructures for thermoelectric energy harvesters.

dc.contributor.authorSu, Jiale
dc.contributor.authorVullers, Ruud
dc.contributor.authorGoedbloed, Martijn
dc.contributor.authorvan Andel, Yvonne
dc.contributor.authorPellens, Rudy
dc.contributor.authorGui, Cheng-Qun
dc.contributor.authorLeonov, Vladimir
dc.contributor.authorWang, Ziyang
dc.date.accessioned2021-10-17T11:04:39Z
dc.date.available2021-10-17T11:04:39Z
dc.date.issued2008-11
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/14524
dc.sourceIIOimport
dc.titleProcess development on large-topography microstructures for thermoelectric energy harvesters.
dc.typeProceedings paper
dc.contributor.imecauthorLeonov, Vladimir
dc.contributor.orcidimecLeonov, Vladimir::0000-0002-4364-8945
dc.source.peerreviewno
dc.source.beginpage365
dc.source.endpage368
dc.source.conference8th Int. Workshop on Micro and Nanotechnology for Power Generation and Energy Conversion Applications - PowerMEMS
dc.source.conferencedate9/11/2008
dc.source.conferencelocationSendai Japan
imec.availabilityPublished - imec


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