Skip to content
Institutional repository
Communities & Collections
Browse all items
Scientific publications
Open knowledge
Log In
imec Publications
Conference contributions
Vapor phase doping with N-type dopant into silicon by atmospheric pressure chamical vapor deposition
Publication:
Vapor phase doping with N-type dopant into silicon by atmospheric pressure chamical vapor deposition
Copy permalink
Date
2008
Meeting abstract
Simple item page
Full metadata
Statistics
Loading...
Loading...
Files
16980.pdf
57.48 KB
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Takeuchi, Shotaro
;
Nguyen, Duy
;
Leys, Frederik
;
Loo, Roger
;
Conard, Thierry
;
Vandervorst, Wilfried
;
Caymax, Matty
Journal
Abstract
Description
Metrics
Views
1881
since deposited on 2021-10-17
1
last month
Acq. date: 2025-12-16
Citations
Metrics
Views
1881
since deposited on 2021-10-17
1
last month
Acq. date: 2025-12-16
Citations