Fabrication of polymer-based devices using nanoimprint technology
| dc.contributor.author | Teng, J. | |
| dc.date.accessioned | 2021-10-17T11:11:21Z | |
| dc.date.available | 2021-10-17T11:11:21Z | |
| dc.date.issued | 2008 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/14543 | |
| dc.source | IIOimport | |
| dc.title | Fabrication of polymer-based devices using nanoimprint technology | |
| dc.type | Oral presentation | |
| dc.date.embargo | 9999-12-31 | |
| dc.source.peerreview | no | |
| dc.source.conference | ePIXnetSpring School '08, Technology for Photonics Integration | |
| dc.source.conferencedate | 11/05/2008 | |
| dc.source.conferencelocation | Elba Italy | |
| imec.availability | Published - open access | |
| imec.internalnotes | 44 -poster nr. 12 |