Low-k reliability
| dc.contributor.author | Tokei, Zsolt | |
| dc.date.accessioned | 2021-10-17T11:19:34Z | |
| dc.date.available | 2021-10-17T11:19:34Z | |
| dc.date.issued | 2008 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/14565 | |
| dc.source | IIOimport | |
| dc.title | Low-k reliability | |
| dc.type | Oral presentation | |
| dc.contributor.imecauthor | Tokei, Zsolt | |
| dc.date.embargo | 9999-12-31 | |
| dc.source.peerreview | no | |
| dc.source.conference | 19th European Symposium on Reliability of Electron Devices, Failure Physics and Analysis | |
| dc.source.conferencedate | 29/09/2008 | |
| dc.source.conferencelocation | Maastricht The Netherlands | |
| imec.availability | Published - open access | |
| imec.internalnotes | Tutorial T4 |