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Overview of porous dielectric materials for semiconductor applications

dc.contributor.authorTravaly, Youssef
dc.contributor.authorEslava Fernandez, Salvador
dc.date.accessioned2021-10-17T11:22:49Z
dc.date.available2021-10-17T11:22:49Z
dc.date.issued2008
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/14574
dc.sourceIIOimport
dc.titleOverview of porous dielectric materials for semiconductor applications
dc.typeMeeting abstract
dc.source.peerreviewno
dc.source.conference2nd International Symposium on Transparent Conductive Oxides
dc.source.conferencedate22/10/2008
dc.source.conferencelocationHersonissos Greece
imec.availabilityPublished - imec


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