Overview of porous dielectric materials for semiconductor applications
dc.contributor.author | Travaly, Youssef | |
dc.contributor.author | Eslava Fernandez, Salvador | |
dc.date.accessioned | 2021-10-17T11:22:49Z | |
dc.date.available | 2021-10-17T11:22:49Z | |
dc.date.issued | 2008 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/14574 | |
dc.source | IIOimport | |
dc.title | Overview of porous dielectric materials for semiconductor applications | |
dc.type | Meeting abstract | |
dc.source.peerreview | no | |
dc.source.conference | 2nd International Symposium on Transparent Conductive Oxides | |
dc.source.conferencedate | 22/10/2008 | |
dc.source.conferencelocation | Hersonissos Greece | |
imec.availability | Published - imec |
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