Design split algorithms validation for DPT implementation at 32 nm and beyond

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Authors
Tritchkov, Alexander; Kempsell, Monica; Glotov, Petr; Sahouria, Emile; Komirenko, Sergiy; Wiaux, Vincent
Conference
5th International Symposium on Immersion Lithography Extensions
Title
Design split algorithms validation for DPT implementation at 32 nm and beyond
Publication type
Proceedings paper
Embargo date
9999-12-31
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