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EBSD analysis of polysilicon films formed by aluminium induced crystallization of amorphous silicon

dc.contributor.authorTuzun, Ozge
dc.contributor.authorAuger, J. M.
dc.contributor.authorGordon, Ivan
dc.contributor.authorFocsa, Alexandru
dc.contributor.authorMontgomery, P.C.
dc.contributor.authorMaurice, C.
dc.contributor.authorSlaoui, Abdou
dc.contributor.authorBeaucarne, Guy
dc.contributor.authorPoortmans, Jef
dc.date.accessioned2021-10-17T11:26:54Z
dc.date.available2021-10-17T11:26:54Z
dc.date.issued2008
dc.identifier.issn0040-6090
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/14584
dc.sourceIIOimport
dc.titleEBSD analysis of polysilicon films formed by aluminium induced crystallization of amorphous silicon
dc.typeJournal article
dc.contributor.imecauthorGordon, Ivan
dc.contributor.imecauthorPoortmans, Jef
dc.contributor.orcidimecGordon, Ivan::0000-0002-0713-8403
dc.contributor.orcidimecPoortmans, Jef::0000-0003-2077-2545
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage6882
dc.source.endpage6887
dc.source.journalThin Solid Films
dc.source.issue20
dc.source.volume516
imec.availabilityPublished - open access


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