Toggle navigation
My submissions
Login
Toggle navigation
View item
imec Publications Repository
imec Publications
Articles
View item
imec Publications Repository
imec Publications
Articles
View item
JavaScript is disabled for your browser. Some features of this site may not work without it.
EBSD analysis of polysilicon films formed by aluminium induced crystallization of amorphous silicon
View/
open
17299.pdf (1.281Mb)
Metadata
Show full item record
Authors
Tuzun, Ozge
;
Auger, J. M.
;
Gordon, Ivan
;
Focsa, Alexandru
;
Montgomery, P.C.
;
Maurice, C.
;
Slaoui, Abdou
;
Beaucarne, Guy
;
Poortmans, Jef
ISSN
0040-6090
Issue
20
Journal
Thin Solid Films
Volume
516
Title
EBSD analysis of polysilicon films formed by aluminium induced crystallization of amorphous silicon
Publication type
Journal article
Embargo date
9999-12-31
Collections
Articles
Search imec Publications Repository
This collection
Browse
All of imec Publications Repository
Collections
Publication date
Authors
Titles
Subjects
imec author
Availability
Publication type
This collection
Publication date
Authors
Titles
Subjects
imec author
Availability
Publication type
My account
login