Publication:

EBSD analysis of polysilicon films formed by aluminium induced crystallization of amorphous silicon

Date

2008
Journal article
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dc.contributor.authorTuzun, Ozge
dc.contributor.authorAuger, J. M.
dc.contributor.authorGordon, Ivan
dc.contributor.authorFocsa, Alexandru
dc.contributor.authorMontgomery, P.C.
dc.contributor.authorMaurice, C.
dc.contributor.authorSlaoui, Abdou
dc.contributor.authorBeaucarne, Guy
dc.contributor.authorPoortmans, Jef
dc.contributor.imecauthorGordon, Ivan
dc.contributor.imecauthorPoortmans, Jef
dc.contributor.orcidimecGordon, Ivan::0000-0002-0713-8403
dc.contributor.orcidimecPoortmans, Jef::0000-0003-2077-2545
dc.date.accessioned2021-10-17T11:26:54Z
dc.date.available2021-10-17T11:26:54Z
dc.date.embargo9999-12-31
dc.date.issued2008
dc.identifier.issn0040-6090
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/14584
dc.source.beginpage6882
dc.source.endpage6887
dc.source.issue20
dc.source.journalThin Solid Films
dc.source.volume516
dc.title

EBSD analysis of polysilicon films formed by aluminium induced crystallization of amorphous silicon

dc.typeJournal article
dspace.entity.typePublication
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