Authors

Urbanowicz, Adam; Meshman, Boris; Schneider, Dieter; Baklanov, Mikhaïl

ISSN

0031-8965

Issue

4

Journal

physica status solidi A

Volume

205

Title

Stiffening and hydrophilisation of SOG low-k material studied by ellipsometric porosimetry, UV ellipsometry and laser-induced surface acoustic waves

Publication type

Journal article