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Stiffening and hydrophilisation of SOG low-k material studied by ellipsometric porosimetry, UV ellipsometry and laser-induced surface acoustic waves

dc.contributor.authorUrbanowicz, Adam
dc.contributor.authorMeshman, Boris
dc.contributor.authorSchneider, Dieter
dc.contributor.authorBaklanov, Mikhaïl
dc.date.accessioned2021-10-17T11:28:25Z
dc.date.available2021-10-17T11:28:25Z
dc.date.issued2008
dc.identifier.issn0031-8965
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/14588
dc.sourceIIOimport
dc.titleStiffening and hydrophilisation of SOG low-k material studied by ellipsometric porosimetry, UV ellipsometry and laser-induced surface acoustic waves
dc.typeJournal article
dc.source.peerreviewyes
dc.source.beginpage829
dc.source.endpage832
dc.source.journalphysica status solidi A
dc.source.issue4
dc.source.volume205
imec.availabilityPublished - imec


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