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Alternative high-k dielectrics for semiconductor applications

dc.contributor.authorVan Elshocht, Sven
dc.contributor.authorAdelmann, Christoph
dc.contributor.authorClima, Sergiu
dc.contributor.authorPourtois, Geoffrey
dc.contributor.authorConard, Thierry
dc.contributor.authorDelabie, Annelies
dc.contributor.authorFranquet, Alexis
dc.contributor.authorLehnen, Peer
dc.contributor.authorMeersschaut, Johan
dc.contributor.authorMenou, Nicolas
dc.contributor.authorPopovici, Mihaela Ioana
dc.contributor.authorRichard, Olivier
dc.contributor.authorSchram, Tom
dc.contributor.authorWang, Xin Peng
dc.contributor.authorHardy, An
dc.contributor.authorDewulf, Daan
dc.contributor.authorvan Bael, M.K.
dc.contributor.authorBlomberg, T.
dc.contributor.authorPieereux, D.
dc.contributor.authorSwerts, J.
dc.contributor.authorMaes, J.W.
dc.contributor.authorWouters, Dirk
dc.contributor.authorDe Gendt, Stefan
dc.contributor.authorKittl, Jorge
dc.date.accessioned2021-10-17T11:46:34Z
dc.date.available2021-10-17T11:46:34Z
dc.date.issued2008
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/14637
dc.sourceIIOimport
dc.titleAlternative high-k dielectrics for semiconductor applications
dc.typeOral presentation
dc.contributor.imecauthorVan Elshocht, Sven
dc.contributor.imecauthorAdelmann, Christoph
dc.contributor.imecauthorClima, Sergiu
dc.contributor.imecauthorPourtois, Geoffrey
dc.contributor.imecauthorConard, Thierry
dc.contributor.imecauthorDelabie, Annelies
dc.contributor.imecauthorFranquet, Alexis
dc.contributor.imecauthorMeersschaut, Johan
dc.contributor.imecauthorPopovici, Mihaela Ioana
dc.contributor.imecauthorRichard, Olivier
dc.contributor.imecauthorSchram, Tom
dc.contributor.imecauthorHardy, An
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.orcidimecVan Elshocht, Sven::0000-0002-6512-1909
dc.contributor.orcidimecAdelmann, Christoph::0000-0002-4831-3159
dc.contributor.orcidimecClima, Sergiu::0000-0002-4044-9975
dc.contributor.orcidimecPourtois, Geoffrey::0000-0003-2597-8534
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.contributor.orcidimecFranquet, Alexis::0000-0002-7371-8852
dc.contributor.orcidimecMeersschaut, Johan::0000-0003-2467-1784
dc.contributor.orcidimecRichard, Olivier::0000-0002-3994-8021
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.source.peerreviewno
dc.source.conference15th Workshop on Dielectrics in Microelectronics - WODIM
dc.source.conferencedate23/06/2008
dc.source.conferencelocationBad Saarow Germany
imec.availabilityPublished - imec


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