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ScCO2-based processes in semiconductor manufacturing: Why did it fail ?

dc.contributor.authorVan Hoeymissen, Jan
dc.contributor.authorMalhouitre, Stephane
dc.date.accessioned2021-10-17T11:51:43Z
dc.date.available2021-10-17T11:51:43Z
dc.date.issued2008
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/14650
dc.sourceIIOimport
dc.titleScCO2-based processes in semiconductor manufacturing: Why did it fail ?
dc.typeProceedings paper
dc.source.peerreviewyes
dc.source.conference11th European Meeting on Supercritical Fluids - ISASF
dc.source.conferencedate4/05/2008
dc.source.conferencelocationBarcelona Spain
imec.availabilityPublished - imec


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