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Photonic interconnect layer on CMOS by wafer scale integration

dc.contributor.authorVan Thourhout, Dries
dc.date.accessioned2021-10-17T12:05:29Z
dc.date.available2021-10-17T12:05:29Z
dc.date.issued2008-06
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/14686
dc.sourceIIOimport
dc.titlePhotonic interconnect layer on CMOS by wafer scale integration
dc.typeMeeting abstract
dc.contributor.imecauthorVan Thourhout, Dries
dc.contributor.orcidimecVan Thourhout, Dries::0000-0003-0111-431X
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.conference12ièmes Journées Nano, Micro et Optoélectronique - JNMO
dc.source.conferencedate3/06/2008
dc.source.conferencelocationIle d'Oleron France
imec.availabilityPublished - imec


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