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Metrology for nano-electronics: challenges and solutions

dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-17T12:10:31Z
dc.date.available2021-10-17T12:10:31Z
dc.date.issued2008
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/14699
dc.sourceIIOimport
dc.titleMetrology for nano-electronics: challenges and solutions
dc.typeProceedings paper
dc.contributor.imecauthorVandervorst, Wilfried
dc.source.peerreviewno
dc.source.conferenceSemicon Europa
dc.source.conferencedate7/10/2008
dc.source.conferencelocationStuttgart Germany
imec.availabilityPublished - imec


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