Conformal doping of FINFET's: a fabrication and metrology challenge

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Authors
Vandervorst, Wilfried; Eyben, Pierre; Jurczak, Gosia; Pawlak, Bartek; Duffy, Ray
Conference
International Symposium on VLSI Technology, Systems and Applications - VLSI-TSA
Title
Conformal doping of FINFET's: a fabrication and metrology challenge
Publication type
Proceedings paper
Embargo date
9999-12-31
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