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Conformal doping of FINFET's: a fabrication and metrology challenge

dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorEyben, Pierre
dc.contributor.authorJurczak, Gosia
dc.contributor.authorPawlak, Bartek
dc.contributor.authorDuffy, Ray
dc.date.accessioned2021-10-17T12:12:33Z
dc.date.available2021-10-17T12:12:33Z
dc.date.issued2008
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/14704
dc.sourceIIOimport
dc.titleConformal doping of FINFET's: a fabrication and metrology challenge
dc.typeProceedings paper
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.imecauthorEyben, Pierre
dc.contributor.imecauthorJurczak, Gosia
dc.contributor.imecauthorPawlak, Bartek
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage158
dc.source.conferenceInternational Symposium on VLSI Technology, Systems and Applications - VLSI-TSA
dc.source.conferencedate21/04/2008
dc.source.conferencelocationHsinchu Taiwan
imec.availabilityPublished - open access


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