Authors

Vandervorst, Wilfried; Eyben, Pierre; Mody, Jay; Jurczak, Gosia; Nguyen, Duy; Takeuchi, Shotaro; Leys, Frederik; Loo, Roger; Caymax, Matty; Everaert, Jean-Luc

Conference

E-MRS Symposium I: Front-End Junction and Contact Formation in Future Silicon/Germanium Based Devices

Title

Conformal doping of FINFET's: a fabrication and metrology challenge

Publication type

Meeting abstract

Embargo date

9999-12-31