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Probing doping conformality in fin shaped field effect transistor structures using resistors

dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorJurczak, Gosia
dc.contributor.authorEveraert, Jean-Luc
dc.contributor.authorPawlak, B.J.
dc.contributor.authorDuffy, Ray
dc.contributor.authorDel-Agua-Bomiquel, J.I.
dc.contributor.authorPoon, T.
dc.date.accessioned2021-10-17T12:13:46Z
dc.date.available2021-10-17T12:13:46Z
dc.date.issued2008
dc.identifier.issn1071-1023
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/14707
dc.sourceIIOimport
dc.titleProbing doping conformality in fin shaped field effect transistor structures using resistors
dc.typeJournal article
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.imecauthorJurczak, Gosia
dc.contributor.imecauthorEveraert, Jean-Luc
dc.source.peerreviewyes
dc.source.beginpage396
dc.source.endpage401
dc.source.journalJournal of Vacuum Science and Technology B
dc.source.issue1
dc.source.volume26
imec.availabilityPublished - imec


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