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Probing electrical properties of semiconductor structures on the nm-scale

dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorMeuris, Marc
dc.contributor.authorDe Wolf, P.
dc.contributor.authorAlvarez, D.
dc.contributor.authorHantschel, Thomas
dc.contributor.authorTrenkler, T.
dc.contributor.authorFouchier, M.
dc.contributor.authorDuhayon, Natasja
dc.contributor.authorPolspoel, Wouter
dc.contributor.authorMody, Jay
dc.date.accessioned2021-10-17T12:14:11Z
dc.date.available2021-10-17T12:14:11Z
dc.date.issued2008
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/14708
dc.sourceIIOimport
dc.titleProbing electrical properties of semiconductor structures on the nm-scale
dc.typeOral presentation
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.imecauthorMeuris, Marc
dc.contributor.imecauthorHantschel, Thomas
dc.contributor.imecauthorDuhayon, Natasja
dc.contributor.orcidimecMeuris, Marc::0000-0002-9580-6810
dc.contributor.orcidimecHantschel, Thomas::0000-0001-9476-4084
dc.source.peerreviewno
dc.source.conferenceSeeing at the Nanoscale VI
dc.source.conferencedate9/07/2008
dc.source.conferencelocationBerlin Germany
imec.availabilityPublished - imec


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