Authors

Seifert, W.; Kittler, M.; Vanhellemont, Jan; Simoen, Eddy; Claeys, Cor; Kirscht, F. G.

Conference

Defect Recognition and Image Processing in Semiconductors - DRIP. Proceedings of the 6th International Conference

Title

Recombination activity of oxygen precipitation related defects in Si

Publication type

Proceedings paper

Embargo date

9999-12-31