The integration of EBIE into a SIMS tool: towards quantitative depth profiles with high resolution and a better understanding of the etch mechanisms
dc.contributor.author | Vanhove, Nico | |
dc.contributor.author | Lievens, Peter | |
dc.contributor.author | Vandervorst, Wilfried | |
dc.date.accessioned | 2021-10-17T12:20:16Z | |
dc.date.available | 2021-10-17T12:20:16Z | |
dc.date.issued | 2008 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/14723 | |
dc.source | IIOimport | |
dc.title | The integration of EBIE into a SIMS tool: towards quantitative depth profiles with high resolution and a better understanding of the etch mechanisms | |
dc.type | Meeting abstract | |
dc.contributor.imecauthor | Vandervorst, Wilfried | |
dc.source.peerreview | no | |
dc.source.conference | FEBIP Workshop | |
dc.source.conferencedate | 7/07/2008 | |
dc.source.conferencelocation | Thun Switzerland | |
imec.availability | Published - imec |
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