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Zero-energy SIMS: Towards quantitative depth profiling with high spatial and high depth resolution

dc.contributor.authorVanhove, Nico
dc.contributor.authorLievens, Peter
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-17T12:20:37Z
dc.date.available2021-10-17T12:20:37Z
dc.date.issued2008
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/14724
dc.sourceIIOimport
dc.titleZero-energy SIMS: Towards quantitative depth profiling with high spatial and high depth resolution
dc.typeMeeting abstract
dc.contributor.imecauthorVandervorst, Wilfried
dc.source.peerreviewno
dc.source.beginpagep115
dc.source.conferenceSIMS Europe: 6th European Workshop on Secondary Ion Mass Spectrometry. Book of Abstracts
dc.source.conferencedate14/09/2008
dc.source.conferencelocationMünster Germany
imec.availabilityPublished - imec


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