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Increasing the mean grain size in copper films and features
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Increasing the mean grain size in copper films and features
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Date
2008
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16529.pdf
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Vanstreels, Kris
;
Brongersma, Sywert
;
Tokei, Zsolt
;
Carbonell, Laure
;
De Ceuninck, Ward
;
D'Haen, Jan
;
D'Olieslaeger, Marc
Journal
Journal of Materials Research
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1
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1811
since deposited on 2021-10-17
Acq. date: 2025-12-18
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Downloads
1
since deposited on 2021-10-17
Acq. date: 2025-12-18
Views
1811
since deposited on 2021-10-17
Acq. date: 2025-12-18
Citations