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Increasing the mean grain size in copper films and features
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Authors
Vanstreels, Kris
;
Brongersma, Sywert
;
Tokei, Zsolt
;
Carbonell, Laure
;
De Ceuninck, Ward
;
D'Haen, Jan
;
D'Olieslaeger, Marc
ISSN
0884-2914
Issue
3
Journal
Journal of Materials Research
Volume
23
Title
Increasing the mean grain size in copper films and features
Publication type
Journal article
Embargo date
9999-12-31
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