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Increasing the mean grain size in copper films and features

dc.contributor.authorVanstreels, Kris
dc.contributor.authorBrongersma, Sywert
dc.contributor.authorTokei, Zsolt
dc.contributor.authorCarbonell, Laure
dc.contributor.authorDe Ceuninck, Ward
dc.contributor.authorD'Haen, Jan
dc.contributor.authorD'Olieslaeger, Marc
dc.date.accessioned2021-10-17T12:21:02Z
dc.date.available2021-10-17T12:21:02Z
dc.date.issued2008
dc.identifier.issn0884-2914
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/14725
dc.sourceIIOimport
dc.titleIncreasing the mean grain size in copper films and features
dc.typeJournal article
dc.contributor.imecauthorVanstreels, Kris
dc.contributor.imecauthorBrongersma, Sywert
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.imecauthorDe Ceuninck, Ward
dc.contributor.imecauthorD'Haen, Jan
dc.contributor.imecauthorD'Olieslaeger, Marc
dc.contributor.orcidimecVanstreels, Kris::0000-0002-4420-0966
dc.contributor.orcidimecBrongersma, Sywert::0000-0002-1755-3897
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage642
dc.source.endpage662
dc.source.journalJournal of Materials Research
dc.source.issue3
dc.source.volume23
imec.availabilityPublished - open access


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