dc.contributor.author | Vanstreels, Kris | |
dc.contributor.author | Brongersma, Sywert | |
dc.contributor.author | Tokei, Zsolt | |
dc.contributor.author | Carbonell, Laure | |
dc.contributor.author | De Ceuninck, Ward | |
dc.contributor.author | D'Haen, Jan | |
dc.contributor.author | D'Olieslaeger, Marc | |
dc.date.accessioned | 2021-10-17T12:21:02Z | |
dc.date.available | 2021-10-17T12:21:02Z | |
dc.date.issued | 2008 | |
dc.identifier.issn | 0884-2914 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/14725 | |
dc.source | IIOimport | |
dc.title | Increasing the mean grain size in copper films and features | |
dc.type | Journal article | |
dc.contributor.imecauthor | Vanstreels, Kris | |
dc.contributor.imecauthor | Brongersma, Sywert | |
dc.contributor.imecauthor | Tokei, Zsolt | |
dc.contributor.imecauthor | De Ceuninck, Ward | |
dc.contributor.imecauthor | D'Haen, Jan | |
dc.contributor.imecauthor | D'Olieslaeger, Marc | |
dc.contributor.orcidimec | Vanstreels, Kris::0000-0002-4420-0966 | |
dc.contributor.orcidimec | Brongersma, Sywert::0000-0002-1755-3897 | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | yes | |
dc.source.beginpage | 642 | |
dc.source.endpage | 662 | |
dc.source.journal | Journal of Materials Research | |
dc.source.issue | 3 | |
dc.source.volume | 23 | |
imec.availability | Published - open access | |