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Capping-metal gate integration technology for multiple-VT CMOS in MuGFETs

dc.contributor.authorVeloso, Anabela
dc.contributor.authorWitters, Liesbeth
dc.contributor.authorDemand, Marc
dc.contributor.authorFerain, Isabelle
dc.contributor.authorSon, Nak Jin
dc.contributor.authorKaczer, Ben
dc.contributor.authorRoussel, Philippe
dc.contributor.authorAdelmann, Christoph
dc.contributor.authorBrus, Stephan
dc.contributor.authorRichard, Olivier
dc.contributor.authorBender, Hugo
dc.contributor.authorConard, Thierry
dc.contributor.authorVos, Rita
dc.contributor.authorRooyackers, Rita
dc.contributor.authorVan Elshocht, Sven
dc.contributor.authorCollaert, Nadine
dc.contributor.authorDe Meyer, Kristin
dc.contributor.authorBiesemans, Serge
dc.contributor.authorJurczak, Malgorzata
dc.date.accessioned2021-10-17T12:24:53Z
dc.date.available2021-10-17T12:24:53Z
dc.date.issued2008
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/14733
dc.sourceIIOimport
dc.titleCapping-metal gate integration technology for multiple-VT CMOS in MuGFETs
dc.typeProceedings paper
dc.contributor.imecauthorVeloso, Anabela
dc.contributor.imecauthorWitters, Liesbeth
dc.contributor.imecauthorDemand, Marc
dc.contributor.imecauthorKaczer, Ben
dc.contributor.imecauthorRoussel, Philippe
dc.contributor.imecauthorAdelmann, Christoph
dc.contributor.imecauthorBrus, Stephan
dc.contributor.imecauthorRichard, Olivier
dc.contributor.imecauthorBender, Hugo
dc.contributor.imecauthorConard, Thierry
dc.contributor.imecauthorVos, Rita
dc.contributor.imecauthorVan Elshocht, Sven
dc.contributor.imecauthorCollaert, Nadine
dc.contributor.imecauthorDe Meyer, Kristin
dc.contributor.imecauthorBiesemans, Serge
dc.contributor.orcidimecKaczer, Ben::0000-0002-1484-4007
dc.contributor.orcidimecRoussel, Philippe::0000-0002-0402-8225
dc.contributor.orcidimecAdelmann, Christoph::0000-0002-4831-3159
dc.contributor.orcidimecRichard, Olivier::0000-0002-3994-8021
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.contributor.orcidimecVan Elshocht, Sven::0000-0002-6512-1909
dc.contributor.orcidimecCollaert, Nadine::0000-0002-8062-3165
dc.source.peerreviewno
dc.source.beginpage119
dc.source.endpage120
dc.source.conferenceIEEE International SOI Conference Proceedings
dc.source.conferencedate6/10/2008
dc.source.conferencelocationNew Paltz, NY USA
dc.identifier.urlhttp://ieeexplore.ieee.org/xpl/conferences.jsp?list=all&findtitle=SOI+&letter=SOI+
imec.availabilityPublished - imec


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