Publication:

Aging phenomena in the removal of nano-particles from Si wafers

Date

2008
Proceedings Paper
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Author(s)

Vereecke, Guy  
;
Veltens, J.
;
Xu, Kaidong
;
Eitoku, A.
;
Sano, Ken-Ichi
;
Arnauts, Sophia  
;
Kenis, Karine  
;
Snow, J.
;
Vinckier, Chris
;
Mertens, Paul  

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