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Litho variations and their impact on the electrical yield of a 32nm node 6T-SRAM cell

dc.contributor.authorVerhaegen, Staf
dc.contributor.authorCosemans, Stefan
dc.contributor.authorDusa, Mircea
dc.contributor.authorMarchal, Pol
dc.contributor.authorNackaerts, Axel
dc.contributor.authorVandenberghe, Geert
dc.contributor.authorDehaene, Wim
dc.date.accessioned2021-10-17T12:29:24Z
dc.date.available2021-10-17T12:29:24Z
dc.date.issued2008-02
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/14743
dc.sourceIIOimport
dc.titleLitho variations and their impact on the electrical yield of a 32nm node 6T-SRAM cell
dc.typeProceedings paper
dc.contributor.imecauthorCosemans, Stefan
dc.contributor.imecauthorDusa, Mircea
dc.contributor.imecauthorVandenberghe, Geert
dc.contributor.imecauthorDehaene, Wim
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage69250R
dc.source.conferenceDesign for Manufacturability through Design-Process Integration II
dc.source.conferencedate24/02/2008
dc.source.conferencelocationSan Jose, CA USA
imec.availabilityPublished - open access
imec.internalnotesProceedings of SPIE; vol. 6925


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