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Chemical analysis of nickel silicides with high spatial resolution by combined EDS and EELS (ELNES)

dc.contributor.authorVerleysen, Eveline
dc.contributor.authorRichard, Olivier
dc.contributor.authorBender, Hugo
dc.contributor.authorSchryvers, Dominique
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-17T12:32:42Z
dc.date.available2021-10-17T12:32:42Z
dc.date.issued2008-09
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/14751
dc.sourceIIOimport
dc.titleChemical analysis of nickel silicides with high spatial resolution by combined EDS and EELS (ELNES)
dc.typeProceedings paper
dc.contributor.imecauthorRichard, Olivier
dc.contributor.imecauthorBender, Hugo
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecRichard, Olivier::0000-0002-3994-8021
dc.source.peerreviewno
dc.source.beginpage455
dc.source.endpage456
dc.source.conference14th European Microscopy Congress
dc.source.conferencedate1/09/2008
dc.source.conferencelocationAachen Germany
imec.availabilityPublished - imec


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