Cu(Mn) seed layers in single damascene trenches with dimensions down to 30 nm

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Authors
Volders, Henny; Richard, Olivier; Carbonell, Laure; Palmans, Roger; Verdonck, Patrick; Heylen, Nancy; Kellens, Kristof; Armini, Silvia; Bender, Hugo; Zhao, Larry; Tokei, Zsolt
Conference
Advanced Metallization Conference - AMC
Title
Cu(Mn) seed layers in single damascene trenches with dimensions down to 30 nm
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Meeting abstract
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