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Deposition of particles on patterned silicon wafers

dc.contributor.authorWali, Faisal
dc.contributor.authorKnotter, Martin
dc.contributor.authorBearda, Twan
dc.contributor.authorMertens, Paul
dc.date.accessioned2021-10-17T12:40:04Z
dc.date.available2021-10-17T12:40:04Z
dc.date.issued2008
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/14769
dc.sourceIIOimport
dc.titleDeposition of particles on patterned silicon wafers
dc.typeOral presentation
dc.contributor.imecauthorMertens, Paul
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.conference9th International Symposium on Ultra Clean Processing of Semiconductor Surfaces - UCPSS
dc.source.conferencedate22/09/2008
dc.source.conferencelocationBrugge Belgium
imec.availabilityPublished - open access


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