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Characterization of poly-Si70%Ge30% for surface mIMECicromachined thermopiles

dc.contributor.authorWang, Ziyang
dc.contributor.authorFiorini, Paolo
dc.contributor.authorLeonov, Vladimir
dc.contributor.authorVan Hoof, Chris
dc.date.accessioned2021-10-17T12:43:31Z
dc.date.available2021-10-17T12:43:31Z
dc.date.issued2008
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/14777
dc.sourceIIOimport
dc.titleCharacterization of poly-Si70%Ge30% for surface mIMECicromachined thermopiles
dc.typeProceedings paper
dc.contributor.imecauthorLeonov, Vladimir
dc.contributor.imecauthorVan Hoof, Chris
dc.contributor.orcidimecLeonov, Vladimir::0000-0002-4364-8945
dc.source.peerreviewyes
dc.source.beginpage23
dc.source.endpage26
dc.source.conferencePowerMEMS
dc.source.conferencedate9/11/2008
dc.source.conferencelocationSendai Japan
imec.availabilityPublished - imec


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