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Realization of a poly-SiGe based micromachined thermopile

dc.contributor.authorWang, Ziyang
dc.contributor.authorLeonov, Vladimir
dc.contributor.authorFiorini, Paolo
dc.contributor.authorVan Hoof, Chris
dc.date.accessioned2021-10-17T12:43:54Z
dc.date.available2021-10-17T12:43:54Z
dc.date.issued2008
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/14778
dc.sourceIIOimport
dc.titleRealization of a poly-SiGe based micromachined thermopile
dc.typeProceedings paper
dc.contributor.imecauthorLeonov, Vladimir
dc.contributor.imecauthorVan Hoof, Chris
dc.contributor.orcidimecLeonov, Vladimir::0000-0002-4364-8945
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage1420
dc.source.endpage1423
dc.source.conferenceEurosensors XXII
dc.source.conferencedate7/09/2008
dc.source.conferencelocationDresden Germany
imec.availabilityPublished - open access


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