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Optimization of Al2O3 interpoly dielectric for embedded flash memory applications
Publication:
Optimization of Al2O3 interpoly dielectric for embedded flash memory applications
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Date
2008
Proceedings Paper
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16154.pdf
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Wellekens, Dirk
;
De Vos, Joeri
;
Van Houdt, Jan
;
van der Zanden, Koen
Journal
Abstract
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1860
since deposited on 2021-10-17
Acq. date: 2026-01-09
Citations
Metrics
Views
1860
since deposited on 2021-10-17
Acq. date: 2026-01-09
Citations