Publication:

Split and design guidelines for double patterning

Date

2008
Proceedings Paper
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14691.pdf 2.54 MB

Author(s)

Wiaux, Vincent  
;
Verhaegen, Staf
;
Cheng, Shaunee
;
Iwamoto, Fumio
;
Jaenen, Patrick  
;
Maenhoudt, Mireille
;
Matsuda, Takashi
;
Postnikov, Sergey
;
Vandenberghe, Geert  

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1884 since deposited on 2021-10-17
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