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The road to flexible MEMS integration

dc.contributor.authorWitvrouw, Ann
dc.date.accessioned2021-10-17T12:49:35Z
dc.date.available2021-10-17T12:49:35Z
dc.date.issued2008
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/14792
dc.sourceIIOimport
dc.titleThe road to flexible MEMS integration
dc.typeProceedings paper
dc.source.peerreviewyes
dc.source.beginpage1075-J05-01
dc.source.conferencePassive and Electromechanical Marterials and Integration
dc.source.conferencedate24/03/2008
dc.source.conferencelocationSan Francisco, CA USA
dc.identifier.urlhttp://www.mrs.org/s_mrs/sec_subsribe.asp?CID=12438&DID=2150477action=detail
imec.availabilityPublished - imec
imec.internalnotesMRS Symposium Proceedings; Vol. 1075E


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