The removal of silica particles from micron wide trenches by megasonic cleaning

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Authors
Wostyn, Kurt; Quenette, V.; Vereecke, Guy; Mertens, Paul
Conference
Ultra Clean Processing of Semiconductor Surfaces VIII - UCPSS
Title
The removal of silica particles from micron wide trenches by megasonic cleaning
Publication type
Proceedings paper
Embargo date
9999-12-31
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