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Influence of the Composition of the Altered Layer on the Ripple Formation

dc.contributor.authorElst, Kathy
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-09-29T12:41:07Z
dc.date.available2021-09-29T12:41:07Z
dc.date.issued1994
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/147
dc.sourceIIOimport
dc.titleInfluence of the Composition of the Altered Layer on the Ripple Formation
dc.typeJournal article
dc.contributor.imecauthorVandervorst, Wilfried
dc.source.peerreviewno
dc.source.beginpage3205
dc.source.endpage3216
dc.source.journalJ. Vac. Sci. Technol. A
dc.source.issue6
dc.source.volume12
imec.availabilityPublished - imec


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