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Removal of nano-particles by aerosol spray: effect of droplet size and velocity on cleaning performance

dc.contributor.authorXu, Kaidong
dc.contributor.authorPichler, Stefan
dc.contributor.authorWostyn, Kurt
dc.contributor.authorCado, Gwenaelle
dc.contributor.authorGale, Glenn
dc.contributor.authorDalmer, Michael
dc.contributor.authorSpringer, Clement
dc.contributor.authorMertens, Paul
dc.contributor.authorBearda, Twan
dc.contributor.authorGaulhofer, Ernst
dc.contributor.authorChen, David
dc.date.accessioned2021-10-17T12:55:47Z
dc.date.available2021-10-17T12:55:47Z
dc.date.issued2008
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/14807
dc.sourceIIOimport
dc.titleRemoval of nano-particles by aerosol spray: effect of droplet size and velocity on cleaning performance
dc.typeOral presentation
dc.contributor.imecauthorWostyn, Kurt
dc.contributor.imecauthorMertens, Paul
dc.contributor.orcidimecWostyn, Kurt::0000-0003-3995-0292
dc.source.peerreviewno
dc.source.conference9th International Symposium on Ultra Clean Processing of Semiconductor Surfaces - UCPSS
dc.source.conferencedate21/09/2008
dc.source.conferencelocationBruges Belgium
imec.availabilityPublished - imec


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