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Conference contributions
In-situ monitoring of megasonic cleaning
Publication:
In-situ monitoring of megasonic cleaning
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Date
2008
Meeting abstract
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17844.pdf
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Zijlstra, Aaldert
;
Janssens, Tom
;
Mertens, Paul
;
Versluis, M.
Journal
Abstract
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1873
since deposited on 2021-10-17
Acq. date: 2025-12-16
Citations
Metrics
Views
1873
since deposited on 2021-10-17
Acq. date: 2025-12-16
Citations