In-situ monitoring of megasonic cleaning
dc.contributor.author | Zijlstra, Aaldert | |
dc.contributor.author | Janssens, Tom | |
dc.contributor.author | Mertens, Paul | |
dc.contributor.author | Versluis, M. | |
dc.date.accessioned | 2021-10-17T13:13:39Z | |
dc.date.available | 2021-10-17T13:13:39Z | |
dc.date.issued | 2008 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/14850 | |
dc.source | IIOimport | |
dc.title | In-situ monitoring of megasonic cleaning | |
dc.type | Meeting abstract | |
dc.contributor.imecauthor | Mertens, Paul | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | no | |
dc.source.conference | Acoustics | |
dc.source.conferencedate | 29/06/2008 | |
dc.source.conferencelocation | Paris France | |
imec.availability | Published - open access |