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ALD high-K and metal gate solutions

dc.contributor.authorAbsil, Philippe
dc.contributor.authorRagnarsson, Lars-Ake
dc.contributor.authorHoffmann, Thomas Y.
dc.contributor.authorBiesemans, Serge
dc.date.accessioned2021-10-17T21:17:03Z
dc.date.available2021-10-17T21:17:03Z
dc.date.issued2009
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/14863
dc.sourceIIOimport
dc.titleALD high-K and metal gate solutions
dc.typeOral presentation
dc.contributor.imecauthorAbsil, Philippe
dc.contributor.imecauthorRagnarsson, Lars-Ake
dc.contributor.imecauthorBiesemans, Serge
dc.contributor.orcidimecRagnarsson, Lars-Ake::0000-0003-1057-8140
dc.source.peerreviewno
dc.source.conferenceASM IEDM Seminar
dc.source.conferencedate9/12/2009
dc.source.conferencelocationBaltimore, MD USA
imec.availabilityPublished - imec


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