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Interface stability in advanced high-k-metal-gate stacks

dc.contributor.authorAdelmann, Christoph
dc.contributor.authorFranquet, Alexis
dc.contributor.authorConard, Thierry
dc.contributor.authorWitters, Thomas
dc.contributor.authorFerain, Isabelle
dc.contributor.authorMeersschaut, Johan
dc.contributor.authorJurczak, Gosia
dc.contributor.authorDe Meyer, Kristin
dc.contributor.authorKittl, Jorge
dc.contributor.authorVan Elshocht, Sven
dc.date.accessioned2021-10-17T21:17:06Z
dc.date.available2021-10-17T21:17:06Z
dc.date.issued2009
dc.identifier.issn1071-1023
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/14866
dc.sourceIIOimport
dc.titleInterface stability in advanced high-k-metal-gate stacks
dc.typeJournal article
dc.contributor.imecauthorAdelmann, Christoph
dc.contributor.imecauthorFranquet, Alexis
dc.contributor.imecauthorConard, Thierry
dc.contributor.imecauthorWitters, Thomas
dc.contributor.imecauthorMeersschaut, Johan
dc.contributor.imecauthorJurczak, Gosia
dc.contributor.imecauthorDe Meyer, Kristin
dc.contributor.imecauthorVan Elshocht, Sven
dc.contributor.orcidimecAdelmann, Christoph::0000-0002-4831-3159
dc.contributor.orcidimecFranquet, Alexis::0000-0002-7371-8852
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.contributor.orcidimecMeersschaut, Johan::0000-0003-2467-1784
dc.contributor.orcidimecVan Elshocht, Sven::0000-0002-6512-1909
dc.source.peerreviewyes
dc.source.beginpage1021
dc.source.endpage1025
dc.source.journalJournal of Vacuum Science and Technology B
dc.source.issue3
dc.source.volume27
dc.identifier.urlhttp://scitation.aip.org/vsearch/servlet/VerityServlet?KEY=JVTBD9&ONLINE=YES&smode=strresults&sort=chron&maxdisp=25&threshold=0&
imec.availabilityPublished - imec


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