dc.contributor.author | Adelmann, Christoph | |
dc.contributor.author | Franquet, Alexis | |
dc.contributor.author | Conard, Thierry | |
dc.contributor.author | Witters, Thomas | |
dc.contributor.author | Ferain, Isabelle | |
dc.contributor.author | Meersschaut, Johan | |
dc.contributor.author | Jurczak, Gosia | |
dc.contributor.author | De Meyer, Kristin | |
dc.contributor.author | Kittl, Jorge | |
dc.contributor.author | Van Elshocht, Sven | |
dc.date.accessioned | 2021-10-17T21:17:06Z | |
dc.date.available | 2021-10-17T21:17:06Z | |
dc.date.issued | 2009 | |
dc.identifier.issn | 1071-1023 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/14866 | |
dc.source | IIOimport | |
dc.title | Interface stability in advanced high-k-metal-gate stacks | |
dc.type | Journal article | |
dc.contributor.imecauthor | Adelmann, Christoph | |
dc.contributor.imecauthor | Franquet, Alexis | |
dc.contributor.imecauthor | Conard, Thierry | |
dc.contributor.imecauthor | Witters, Thomas | |
dc.contributor.imecauthor | Meersschaut, Johan | |
dc.contributor.imecauthor | Jurczak, Gosia | |
dc.contributor.imecauthor | De Meyer, Kristin | |
dc.contributor.imecauthor | Van Elshocht, Sven | |
dc.contributor.orcidimec | Adelmann, Christoph::0000-0002-4831-3159 | |
dc.contributor.orcidimec | Franquet, Alexis::0000-0002-7371-8852 | |
dc.contributor.orcidimec | Conard, Thierry::0000-0002-4298-5851 | |
dc.contributor.orcidimec | Meersschaut, Johan::0000-0003-2467-1784 | |
dc.contributor.orcidimec | Van Elshocht, Sven::0000-0002-6512-1909 | |
dc.source.peerreview | yes | |
dc.source.beginpage | 1021 | |
dc.source.endpage | 1025 | |
dc.source.journal | Journal of Vacuum Science and Technology B | |
dc.source.issue | 3 | |
dc.source.volume | 27 | |
dc.identifier.url | http://scitation.aip.org/vsearch/servlet/VerityServlet?KEY=JVTBD9&ONLINE=YES&smode=strresults&sort=chron&maxdisp=25&threshold=0& | |
imec.availability | Published - imec | |