Publication:

Interface stability in advanced high-k-metal-gate stacks

Date

2009
Journal article
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Author(s)

Adelmann, Christoph  
;
Franquet, Alexis  
;
Conard, Thierry  
;
Witters, Thomas  
;
Ferain, Isabelle
;
Meersschaut, Johan  
;
Jurczak, Gosia  
;
De Meyer, Kristin  
;
Kittl, Jorge
;
Van Elshocht, Sven  

Journal

Journal of Vacuum Science and Technology B

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1919 since deposited on 2021-10-17
Acq. date: 2025-12-10

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1919 since deposited on 2021-10-17
Acq. date: 2025-12-10

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