Publication:

Interface stability in advanced high-k-metal-gate stacks

Date

2009
Journal article
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dc.contributor.authorAdelmann, Christoph
dc.contributor.authorFranquet, Alexis
dc.contributor.authorConard, Thierry
dc.contributor.authorWitters, Thomas
dc.contributor.authorFerain, Isabelle
dc.contributor.authorMeersschaut, Johan
dc.contributor.authorJurczak, Gosia
dc.contributor.authorDe Meyer, Kristin
dc.contributor.authorKittl, Jorge
dc.contributor.authorVan Elshocht, Sven
dc.contributor.imecauthorAdelmann, Christoph
dc.contributor.imecauthorFranquet, Alexis
dc.contributor.imecauthorConard, Thierry
dc.contributor.imecauthorWitters, Thomas
dc.contributor.imecauthorMeersschaut, Johan
dc.contributor.imecauthorJurczak, Gosia
dc.contributor.imecauthorDe Meyer, Kristin
dc.contributor.imecauthorVan Elshocht, Sven
dc.contributor.orcidimecAdelmann, Christoph::0000-0002-4831-3159
dc.contributor.orcidimecFranquet, Alexis::0000-0002-7371-8852
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.contributor.orcidimecMeersschaut, Johan::0000-0003-2467-1784
dc.contributor.orcidimecVan Elshocht, Sven::0000-0002-6512-1909
dc.date.accessioned2021-10-17T21:17:06Z
dc.date.available2021-10-17T21:17:06Z
dc.date.issued2009
dc.identifier.issn1071-1023
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/14866
dc.identifier.urlhttp://scitation.aip.org/vsearch/servlet/VerityServlet?KEY=JVTBD9&ONLINE=YES&smode=strresults&sort=chron&maxdisp=25&threshold=0&
dc.source.beginpage1021
dc.source.endpage1025
dc.source.issue3
dc.source.journalJournal of Vacuum Science and Technology B
dc.source.volume27
dc.title

Interface stability in advanced high-k-metal-gate stacks

dc.typeJournal article
dspace.entity.typePublication
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