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Copper CMP with composite polymer core - silica shell abrasives: A defectivity study

dc.contributor.authorArmini, Silvia
dc.contributor.authorWhelan, Caroline
dc.contributor.authorMoinpour, Mansour
dc.contributor.authorMaex, Karen
dc.date.accessioned2021-10-17T21:18:10Z
dc.date.available2021-10-17T21:18:10Z
dc.date.issued2009
dc.identifier.issn0013-4651
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/14909
dc.sourceIIOimport
dc.titleCopper CMP with composite polymer core - silica shell abrasives: A defectivity study
dc.typeJournal article
dc.contributor.imecauthorArmini, Silvia
dc.contributor.imecauthorMaex, Karen
dc.contributor.orcidimecArmini, Silvia::0000-0003-0578-3422
dc.source.peerreviewyes
dc.source.beginpageH18
dc.source.endpageH26
dc.source.journalJournal of the Electrochemical Society
dc.source.issue1
dc.source.volume156
imec.availabilityPublished - imec


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