Copper CMP with composite polymer core - silica shell abrasives: A defectivity study

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Authors

Armini, Silvia; Whelan, Caroline; Moinpour, Mansour; Maex, Karen

ISSN

0013-4651

Issue

1

Journal

Journal of the Electrochemical Society

Volume

156

Title

Copper CMP with composite polymer core - silica shell abrasives: A defectivity study

Publication type

Journal article

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