Publication:
Copper CMP with composite polymer core - silica shell abrasives: A defectivity study
Date
| dc.contributor.author | Armini, Silvia | |
| dc.contributor.author | Whelan, Caroline | |
| dc.contributor.author | Moinpour, Mansour | |
| dc.contributor.author | Maex, Karen | |
| dc.contributor.imecauthor | Armini, Silvia | |
| dc.contributor.imecauthor | Maex, Karen | |
| dc.contributor.orcidimec | Armini, Silvia::0000-0003-0578-3422 | |
| dc.date.accessioned | 2021-10-17T21:18:10Z | |
| dc.date.available | 2021-10-17T21:18:10Z | |
| dc.date.issued | 2009 | |
| dc.identifier.issn | 0013-4651 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/14909 | |
| dc.source.beginpage | H18 | |
| dc.source.endpage | H26 | |
| dc.source.issue | 1 | |
| dc.source.journal | Journal of the Electrochemical Society | |
| dc.source.volume | 156 | |
| dc.title | Copper CMP with composite polymer core - silica shell abrasives: A defectivity study | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
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