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Analysis of nanoparticles with elastic recoil detection

dc.contributor.authorArstila, Kai
dc.contributor.authorBrijs, Bert
dc.contributor.authorGiangrandi, Simone
dc.contributor.authorHantschel, Thomas
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-17T21:18:17Z
dc.date.available2021-10-17T21:18:17Z
dc.date.issued2009
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/14912
dc.sourceIIOimport
dc.titleAnalysis of nanoparticles with elastic recoil detection
dc.typeProceedings paper
dc.contributor.imecauthorHantschel, Thomas
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecHantschel, Thomas::0000-0001-9476-4084
dc.source.peerreviewyes
dc.source.conference19th Ion Beam Analysis Conference - IBA
dc.source.conferencedate7/09/2009
dc.source.conferencelocationCambridge UK
imec.availabilityPublished - imec


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